In comparison with the conventional mechanical products, the mass flow measurement/control technology used in a mass flow meter and controller extracts electrical signals from the flow without significantly influencing the temperature or pressure, thus permitting sophisticated flow measurement and control. The technology is widely used for manufacturing semiconductors, liquid crystal, optical fibers and other electronic devices, gas supply for fuel cells, and fuel gas control for burners, foods, biotechnology, as well as for experimental facilities and production/inspection systems in many other industries.

Features

・Accurate flow measurement and Excellent function
・Full scale 10sccm to 500SLM
・11 Rrange standard stock for fast delivery
・RS-485 communication
・RoHS, CE compliant
・Compact design
・Single power supply connection
・Gas select switch

Applications

Air sampling
Analyzer component
Bioreactor
Biotechnological process
Burn control
CCFL manufacturing
Chamber pressure control
Chemical process
Environment monitoring
Electronic device manufacturing
Food production
Fuel cell testing

Specifications

Sensor type		Thermal (EX sensor)
Flow range(N2)		10 /50 /100 /500SCCM　　1 /5 /10 /20SLM	50 /100 /200SLM
Applicable gases（*1）		N2(Air, H2, He, Ar, O2, CO2 and C.F.)	N2(Air, Ar and C.F.)
Response		within 2sec
Accuracy（*2）		± 1.0%F.S. (25℃ )	± 1.5%F.S.(25℃ )
Temperature coefficient		± 0.2%F.S./℃　(15 ～ 35℃ ) 　※ 200SLM ± 0.4%F.S./℃
Repeatability		± 0.2%F.S.
Proof pressure		980 ｋ Pa(G)
Working Temp.		5 ～ 50℃
Allowable storage temp.		-10 ～ 60℃
Materials of gas contact part		SUS316, SUS316L, PTFE, FKM (optional NBR,CRP)
Power connection		Adaptor or Dsub 9 pin
Digital communication		RS485（MODBUS protocol, RTU mode）
Required power supply (DC)		24VDC( ± 10%) 100mA
Joint		1/4F900 (standard)	3/8F900 (standard)
Needle valve (option)		MODEL2412	MODEL2412D
Signal	Event output	2 x NPN open collector output, integrating pulse output　(Maximum rating DC30V 50mA)
	Flow output（*3)	① 4 ～ 20mA ② 0 ～ 5V ③ 1 ～ 5V
Weight		Approx. 600g (without fittings)	Approx. 700g (without fittings)
（*1）　The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
N2 calibration only.
（*2）　Guarantee only N2 accuracy.
（*3）　Selectable when you order.