Kofloc Model 3760 Standaid Mass Flow Meter is a compact, low-cost mass flow meter developed based on the Model 3660 Series. It has been developed as a standard model of various analyzers and vacuum equipment for research and development at universities and research institutes.

Standard Specifications:

1. Flow range (N2 equivalent, 20℃/1atm)

3760: 10 SCCM–20 SLM (freely selectable)
3765: 30 SLM–100 SLM (freely selectable)

2. Sensor: Thermal mass flow sensor

3. Response

3760: 2 sec. or less
3765 : 3 sec. or less

4. Accuracy

3760: ±1.0%F.S. (25℃)
3765: ±1.5%F.S. (25℃)

5. Temperature coefficient

3760: ±0.1 F.S./℃ (15–35℃)
3765: ±0.2 F.S./℃ (15–35℃)

6. Repeatability: ±0.5%F.S. (20℃)

7. Proof pressure: 980kPa (G)

8. Leak rate: 1 × 10-8 Pa•m3/s or less (excluding permeation of He)

9. Allowable ambient temperature: 5–45℃

10. Allowable ambient humidity: 10–90% (No condensation allowed)

11. Materials of parts in contact with gases : Body: SUS316

Sealing: FKM (option: CR or NBR)

12. Electric connection: Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)

13. Flow rate output signals : 0–5 VDC (External load resistance: 250 kΩ or more)

14. Required power supply : +15VDC (±5%) 100mA, −15VDC (±5%)100mA

15. Joint (Main unit bore)

Features

Improved constant-current temperature difference detection type flow sensor for quick response
The compact body permits installation at any location.

Applications

Applicable gas：N2,Air,H2,He,Ar,O2,CO2 etc.
Air sampling
Analyzer component
Bioreactor
Biotechnological process
Burn control
CCFL manufacturing
Chamber pressure control
Chemical process
Environment monitoring
Electronic device manufacturing
Food production
Fuel cell testing
Fermentation process
Gas blending
Gas distribution
Gas flow monitoring
Gas generation
Industrial furnace
Leak testing
Pharmaceutical process
Pollution monitoring
Process flow control
R&D
Solar power element manufacturing
Secondary calibration reference
Semiconductor process
Surface treatment process
Thermal flame spray
Thin film manufacturing
Vapor deposition

Specifications

Model	3760	3765
Flow range (N2 equivalent, 20℃/1atm)	10 SCCM–20 SLM (freely selectable)	30 SLM–100 SLM (freely selectable)
Sensor	Thermal mass flow sensor
Response	2 sec. or less	3 sec. or less
Accuracy	±1.0%F.S. (25℃)	±1.5%F.S. (25℃)
Temperature coefficient	±0.1 F.S./℃ (15–35℃)	±0.2 F.S./℃ (15–35℃)
Repeatability	±0.5%F.S. (20℃)
Proof pressure	980kPa (G)
Leak rate	1 × 10^-8 Pa·m³/s or less (excluding permeation of He)
Allowable ambient temperature	5–45℃
Allowable ambient humidity	10–90% (No condensation allowed)
Materials of parts in contact with gases	Body: SUS316
Materials of parts in contact with gases	Sealing: FKM (option: CR or NBR)
Electric connection	Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate output signals	0–5 VDC (External load resistance: 250 kΩ or more)
Required power supply	+15VDC (±5%) 100mA, −15VDC (±5%)100mA
Joint (Main unit bore)	Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc.	Standard: 3/8SWL Option: 1/2SWL 3/8VCR RC3/8, etc.
Weight	Approx. 800 g	Approx. 1000 g

!!Note!!
Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.