Kofloc Model 6610 Pressure Regulator Valve

Kofloc Model 6610 Pressure Regulator Valve controls the pressure applied to the flow to keep it constant or reduce the pressure during flow control. Pressure-regulating valves are classified into reducing valves and back-pressure valves. Reducing valves make the outlet-side pressure constant when the pressure on the inlet side changes, and are used at the first stage of systems in general. Meanwhile, back-pressure valves are a kind of constant-volume relief valve that removes gas while keeping the primary-side pressure constant.

This valve has been developed for better repeatability and quick, reliable pressure regulation by increasing the accuracy of the low-pressure side compared with the Model 6600. It is ideal for high-sensitivity analyzers and semiconductor manufacturing equipment, as well as for research and development.

Features

High-precision regulation on the low-pressure side. High regulation performance with repeatability of ±1% or less when the pressure on the primary side and load resistance on the secondary side change under the set pressure condition of 0.01–0.15 MPa.
Non-grease specification. The sections in contact with gas are made of stainless steel, Viton, and Teflon without using grease. This valve is ideal for the semiconductor industry which requires ultra-clean conditions.

Lock nut. The regulating position, once it has been set, can be fixed by a lock nut to prevent the setting from changing.
Non-bleed type. This non-bleed type valve prevents gas from leaking to the outside.

Applications

Gas chromatography
High-purity gas control
Low-pressure controllers
Semiconductor industry

Specifications

Fluids	Various gases
Maximum primary pressure	0.4MPa
Secondary control pressure	0.01-0.15MPa
Maximum flow	5L/MIN
Minimum operating differential pressure	0.1 MPa or more
Materials of parts in contact with gases	SUS316, FKM, fluorocarbon resin, SUS304, SUS303
Proof pressure	0.8MPa
Repeatability	Within ±1% of the pressure rating
Heat resistance	5℃-60℃
Connection end	Rc1/8
Materials of parts in contact with fluids	SUS316, FKM, fluorocarbon resin, SUS304, SUS303