FCON 2000 Series Digital Mass Flow Controller

Product Note:

No product notes available.

Categories: Flow Measurement, Thermal Mass Flow Meter Tags: Fcon, Flow Measurement, Thermal Gas Flow Meter

Description

FCON 2000 Series Digital Mass Flow Controller

FCON 2000 Series Digital Mass Flow Controller is a digital mass flow controller with a built-in display and in-built setting control, Equipped with a flow rate alarm and accumulation function, Compact, Digital Control Application Software, Compact and lightweight integrated unit Ease of use Can be installed in multiple positions.

e FCON 2000 Series Digital Mass Flow Controller (MFC) is a high-precision, thermal-based gas mass flow control instrument engineered for accurate monitoring and fast-response control of industrial process gases. Manufactured for demanding gas handling environments, the FCON 2000 Series features an advanced thermal mass flow sensor combined with a fast-acting proportional solenoid control valve and micro-processor electronics. Designed for semiconductor processing, vacuum coating, gas blending, burner control, and laboratory research, the FCON 2000 Series offers high repeatability, minimal temperature drift, and versatile digital ( $RS-485$ ) and analog ( $0\text{--}5\text{ V}$ / 4-20mA) control interfaces.

Specifications

Parameter	Specification
Product Series	FCON 2000 Series
Focus Keyword Target	FCON 2000 Series Digital Mass Flow Controller
Measurement Principle	Capillary Thermal Mass Flow Sensing
Target Media	Clean, Dry Process Gases ( $text{N}_2$ , $text{Ar}$ , $text{O}_2$ , $text{CO}_2$ , $text{He}$ , $text{H}_2$ , Air)
Flow Rate Range	$10 text{SCCM}$ up to $100 text{SLM}$ (Standard Liters per Minute) full scale options
Control Accuracy	$pm 1.0%$ Full Scale
Repeatability	$pm 0.2%$ Full Scale
Response Time	$le 1.0 text{second}$ to reach within $pm 2%$ of target setpoint
Operating Pressure Range	$0.1 text{MPa to } 0.3 text{MPa}$ differential pressure ( $1.0 text{MPa}$ max pressure)
Operating Temperature	$5^circtext{C to }+50^circtext{C}$ ( $41^circtext{F to }+122^circtext{F}$ )
Control Signals	Analog: $0text{--}5 text{VDC}, 4text{--}20 text{mA}$ / Digital: $RS-485$ Modbus
Process Connections	$1/4" text{ Swagelok / VCR / compression fittings}$
Wetted Materials	Stainless Steel SUS316L, Viton / Kalrez / Fluororubber seals

Features

High Control Precision & Repeatability: Delivers $pm 1.0%$ Full Scale accuracy and $pm 0.2%$ Full Scale repeatability across wide dynamic flow ranges.
Fast Response Time: Features a high-speed proportional solenoid valve capable of reaching stable setpoint flow control within $le 1 text{ second}$ .
Dual Digital & Analog Communication: Supports standard $RS-485$ (Modbus RTU) digital communication along with classic analog setpoint/output signals ( $0text{--}5text{ VDC}$ or $4text{--}20text{ mA}$ ).
Multi-Gas Calibration Capability: Microprocessor holds pre-programmed conversion factors for various process gases ( $text{N}_2$ , $text{Ar}$ , $text{O}_2$ , $text{CO}_2$ , $text{H}_2$ , $text{CH}_4$ ).
Corrosion-Resistant Stainless Construction: Built with SUS316L stainless steel wetted components and high-integrity seals for high gas purity and chemical durability.
Low Pressure Drop Operation: Engineered bypass channels allow low differential pressure operation across high dynamic flow ranges.

Applications

Semiconductor & Thin-Film Deposition: Precision process gas delivery for chemical vapor deposition (CVD), sputtering, and plasma etching tools.
Vacuum Coating & Surface Treatment: Accurate argon and reactive gas metering for PVD coaters and optical glass coating chambers.
Industrial Burner & Flame Control: Mass-flow based air-to-fuel ratio control for thermal processing and glass blowing rigs.
Bioreactors & Gas Mixing Systems: Controlled sparging of oxygen, carbon dioxide, and nitrogen in fermentation tanks and gas mixing manifolds.

FCON 2000 Series Digital Mass Flow Controller

FCON 2000 Series Digital Mass Flow Controller is a digital mass flow controller with a built-in display and in-built setting control, Equipped with a flow rate alarm and accumulation function.

Product Note:

No product notes available.

Categories: Flow Measurement, Thermal Mass Flow Meter Tags: Fcon, Flow Measurement, Thermal Gas Flow Meter

FCON 2000 Series Digital Mass Flow Controller

Description

FCON 2000 Series Digital Mass Flow Controller

Specifications

Parameter	Specification
Product Series	FCON 2000 Series
Focus Keyword Target	FCON 2000 Series Digital Mass Flow Controller
Measurement Principle	Capillary Thermal Mass Flow Sensing
Target Media	Clean, Dry Process Gases ( $text{N}_2$ , $text{Ar}$ , $text{O}_2$ , $text{CO}_2$ , $text{He}$ , $text{H}_2$ , Air)
Flow Rate Range	$10 text{SCCM}$ up to $100 text{SLM}$ (Standard Liters per Minute) full scale options
Control Accuracy	$pm 1.0%$ Full Scale
Repeatability	$pm 0.2%$ Full Scale
Response Time	$le 1.0 text{second}$ to reach within $pm 2%$ of target setpoint
Operating Pressure Range	$0.1 text{MPa to } 0.3 text{MPa}$ differential pressure ( $1.0 text{MPa}$ max pressure)
Operating Temperature	$5^circtext{C to }+50^circtext{C}$ ( $41^circtext{F to }+122^circtext{F}$ )
Control Signals	Analog: $0text{--}5 text{VDC}, 4text{--}20 text{mA}$ / Digital: $RS-485$ Modbus
Process Connections	$1/4" text{ Swagelok / VCR / compression fittings}$
Wetted Materials	Stainless Steel SUS316L, Viton / Kalrez / Fluororubber seals

Features

High Control Precision & Repeatability: Delivers $pm 1.0%$ Full Scale accuracy and $pm 0.2%$ Full Scale repeatability across wide dynamic flow ranges.
Fast Response Time: Features a high-speed proportional solenoid valve capable of reaching stable setpoint flow control within $le 1 text{ second}$ .
Dual Digital & Analog Communication: Supports standard $RS-485$ (Modbus RTU) digital communication along with classic analog setpoint/output signals ( $0text{--}5text{ VDC}$ or $4text{--}20text{ mA}$ ).
Multi-Gas Calibration Capability: Microprocessor holds pre-programmed conversion factors for various process gases ( $text{N}_2$ , $text{Ar}$ , $text{O}_2$ , $text{CO}_2$ , $text{H}_2$ , $text{CH}_4$ ).
Corrosion-Resistant Stainless Construction: Built with SUS316L stainless steel wetted components and high-integrity seals for high gas purity and chemical durability.
Low Pressure Drop Operation: Engineered bypass channels allow low differential pressure operation across high dynamic flow ranges.

Applications

Semiconductor & Thin-Film Deposition: Precision process gas delivery for chemical vapor deposition (CVD), sputtering, and plasma etching tools.
Vacuum Coating & Surface Treatment: Accurate argon and reactive gas metering for PVD coaters and optical glass coating chambers.
Industrial Burner & Flame Control: Mass-flow based air-to-fuel ratio control for thermal processing and glass blowing rigs.
Bioreactors & Gas Mixing Systems: Controlled sparging of oxygen, carbon dioxide, and nitrogen in fermentation tanks and gas mixing manifolds.

FCON 2000 Series Digital Mass Flow Controller

Product Note:

Description

FCON 2000 Series Digital Mass Flow Controller

Specifications

Features

Applications

Related Products

FCON 2000 Series Digital Mass Flow Controller

Product Note:

Description

FCON 2000 Series Digital Mass Flow Controller

Specifications

Features

Applications

Related products