Kofloc Digital Mass Flow Controller DF-200C S

The DF-200 series is a high-performance digital mass flow controller with ±1%S.P. accuracy and ≤1-sec response.
It also has a multiple-gas and multiple-range function of seven gases and the ease of changing the flow rate range of each gas.


  • High accuracy(±1%RD),Fast response(1 sec.max.in all range)
  • Multiple ranges and multiple gases supported
  • Communications functions installed as a standard feature(RS485)
  • RoHS/CE Standard compliant


Sensor type Thermal sensor
Valve type Normally closed proportional solenoid valve
Applicable gases*1 Multiple gases : N2 (Air, H2, He, Ar, O2, CO2)*2
Flow range*3 10/30/50/100/300/500 SCCM, 1/3/5/10 SLM*2
Control range 2 to 100% (F.S.)
Response*4 Total flow rate control range ±1 sec (within ±2% F.S.)
Accuracy*5 ±1.0% S.P. (> 35% F.S.)
±0.35% F.S. (≤ 35% F.S.)
Repeatability ±0.25% F.S.
Operating differential pressure*6 50 to 300 kPa (100 to 300 kPa for Ar and CO2)
Inlet maximum pressure 500kPa(G)
Proof pressure 980kPa(G)
External leak rate ≤1.0 x 10-8 Pa·m3/sec (He)
Temperature Working temp. 5 to 50℃
Accuracy guaranteed temp. 15 to 35℃
Allowable storage temp. -10 to 60℃
Allowable operating humidity 10 to 90% RH (without dew condensation)
Materials of gas contact part SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM
Electrical connection D-sub 9-pin, KFC standard (SEMI standard compliant), RJ-45 modular jacks (two)
Flow rate setting signal 0 to 5 V DC (input impedance: approx. 1 MΩ)
Flow rate output signal 0 to 5 V DC (load resistance 10 kΩ)
Digital communication Address setting with RS485 rotary switch : up to 99 devices (9600 bps)
Required power supply (DC) +15 V DC (±5%): 150 mA, -15 V DC (±5%): 150 mA
Joint*7 1/4 F900 (standard), 1/4 UJR, Rc 1/4
Mounting posture Horizontal installation recommended.
Weight*8 Approx. 850 g

*1 The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
*2 Dedicated software is available to change gases or change the actual full scale (F.S.) within the range of 30 to 100% (30 to 80% for CO2 only) of the specified full scale.
*3 The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
*4 Guarantee for calibration gas: N2.
*5 Accuracy for calibration gas: N2, flow range (max. full scale).
*6 The operating differential pressure may differ depending on specifications.
*7 Contact us for any other joints.
*8 Exclusive of the weight of joint

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