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Kofloc Model 3200 Mass Flow Controller

Kofloc Model 3200 Mass Flow Controller is an advanced model designed as a successor of the 3910 Series that enjoys wide use for diverse applications such as the manufacture of semiconductors, LCDs, combustion equipment, analytical devices, and biotechnology fields.

Kofloc Model 3200 Mass Flow Controller is an advanced model designed as a successor of the 3910 Series that enjoys wide use for diverse applications such as the manufacture of semiconductors, LCDs, combustion equipment, analytical devices, and biotechnology fields. Its high performance is equal to a new standard of KOFLOC.

Standard Specifications

  • Flow range (N2 equivalent, 20℃/1 atm): 1 SCCM–20 SLM (The conditions are freely selectable)
  • Sensor: Thermal mass flow sensor
  • Valve type: Proportional solenoid valve (closed when not energized)
  • Control range: 2–100% (F.S.)
  • Response: 1 sec. or less (0–100% within ±2% typical)
  • Accuracy: ±1% F.S. (Accuracy guaranteed at 15–35℃)
  • Repeatability: ±0.2%F.S.
  • Operating differential pressure : * F.S. ≤ 5 SLM: 50–300 kPa (G)
  • F.S.> 5 SLM: 100–300 kPa (G)
  • Option: Low differential pressure (LP) specification is available depending on conditions.
  • Allowable operating pressure: 300 kPa (G) or less
  • Proof pressure: 980 kPa (G)
  • Leak rate: 1 × 10-8 Pa•m3/s or less (excluding permeation of He)

Features

  • Equipped with a temperature follow-up type current difference detection flow sensor (patent applied for) to ensure high accu-racy and high-speed response
  • Use of a normally closed valve to ensure safety
  • Reduced dead volume thanks to the diaphragm seat valve
  • Control of small quantities of flows available up to 1 SCCM fullscale (SR option)
  • Low differential pressure type control available for combustiblegases (LP option)

Applications

  • Applicable gas:N2,Air,H2,He,Ar,O2,CO2 etc.
  • Air sampling
  • Analyzer component
  • Bioreactor
  • Biotechnological process
  • Burn control
  • CCFL manufacturing
  • Chamber pressure control
  • Chemical process
  • Environment monitoring
  • Electronic device manufacturing
  • Food production
  • Fuel cell testing
  • Fermentation process
  • Gas blending
  • Gas distribution
  • Gas flow monitoring
  • Gas generation
  • Industrial furnace
  • Leak testing
  • Pharmaceutical process
  • Pollution monitoring
  • Process flow control
  • R&D
  • Solar power element manufacturing

Specifications

Flow range (N2 equivalent,
20℃/1 atm)
1 SCCM–20 SLM (The conditions are freely selectable)
Sensor Thermal mass flow sensor
Valve type Proportional solenoid valve (closed when not energized)
Control range 2–100% (F.S.)
Response 1 sec. or less (0–100% within ±2% typical)
Accuracy ±1% F.S. (Accuracy guaranteed at 15–35℃)
Repeatability ±0.2%F.S.
Operating differential
pressure
F.S. ≤ 5 SLM: 50–300 kPa (G)
F.S.> 5 SLM: 100–300 kPa (G)
Option: Low differential pressure (LP) specification is available depending on conditions.
Allowable operating pressure 300 kPa (G) or less
Proof pressure 980 kPa (G)
Leak rate 1 × 10-8 Pa·m3/s or less (excluding permeation of He)
Allowable ambient
temperature
0–50℃
Allowable ambient humidity 10–90% (No condensation allowed)
Materials of parts in
contact with gases
Body: SUS316L
Diaphragm: SUS316
Valve seat: FKM (option: CR, NBR or perfluor)
Sealing: FKM (option: CR, NBR or perfluor)
Electric connection Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate input signals 0–5 VDC (Input impedance: 1 MΩ or more)
Flow rate output signals 0–5 VDC (External load resistance: 250 kΩ or more)
Required power supply +15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA
Joint (Main unit bore) Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc.
Weight Approx. 1000 g

!!Note !!
Specifications relating to the flow range (e.g., flow range, accuracy and re-sponse) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.

Downloads

Datasheet: Kofloc Model 3200 Mass Flow Controller

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