Description
Kofloc Model 5100 Mass Flow Controller
Kofloc Model 5100 Mass Flow Controller features weldless structure, metal seals, an accuracy of ?±1%, a response of ?±1 second, and other basic performance conditions required for semiconductor process control, and additionally, has achieved a significant price reduction.
Materials of the parts in contact with gases:
- Body: SUS316L
- Diaphragm:
* Valve seat: PTFE
* Sealing: SUS316L, Ni, Au
* Option: SUS seal (SU), inner surface polish (KP) - Electric connection: 9-pin Dsub connector as per Standard KFC (Compliant with SEMI Standard)
- Flow rate input signals: 0-5 VDC (Input impedance: 1 M? or more)
- Flow rate output signals: 0-5 VDC (External load resistance: 250 k? or more)
- Required power supply: +15 VDC (±5%) 100 mA, ?15 VDC (±5%) 200 mA
- Joint (Main unit bore) : Standard: 1/4 VCR equivalent Option: 1/4 SWL
- Weight: Approx. 1000 g
Standard Specifications
- Flow range(N2 equivalents, 06 ?/1 atm): 1 SCCM – 20 SLM (The conditions are freely selectable)
- Sensor: Thermal mass flow sensor
- Valve type: Proportional solenoid valve (closed when not energized)
- Control range: 2 – 100% (Porto)
