Description
Kofloc Model 3200 Mass Flow Controller
Kofloc Model 3200 Mass Flow Controller is an advanced model designed as a successor of the 3910 Series that enjoys wide use for diverse applications such as the manufacture of semiconductors, LCDs, combustion equipment, analytical devices, and biotechnology fields. Its high performance is equal to a new standard of KOFLOC.
Standard Specifications
- Flow range (N2 equivalent, 20?/1 atm): 1 SCCM–20 SLM (The conditions are freely selectable)
- Sensor: Thermal mass flow sensor
- Valve type: Proportional solenoid valve (closed when not energized)
- Control range: 2–100% (F.S.)
- Response: 1 sec. or less (0–100% within ±2% typical)
- Accuracy: ±1% F.S. (Accuracy guaranteed at 15–35?)
- Repeatability: ±0.2%F.S.
- Operating differential pressure : * F.S. ? 5 SLM: 50–300 kPa (G)
- F.S.> 5 SLM: 100–300 kPa (G)
- Option: Low differential pressure (LP) specification is available depending on conditions.
- Allowable operating pressure: 300 kPa (G) or less
- Proof pressure: 980 kPa (G)
- Leak rate: 1 × 10-8 Pa•m3/s or less (excluding permeation of He)
