Description

Kofloc Model 3760 Standard Mass Flow Meter

Kofloc Model 3760 Standard Mass Flow Meter is a compact, low-cost mass flow meter developed based on the Model 3660 Series. It has been developed as a standard model of various analyzers and vacuum equipment for research and development at universities and research institutes.

Standard Specifications:

1. Flow range (N2 equivalent, 20?/1atm)

• 3760: 10 SCCM–20 SLM (freely selectable)
• 3765: 30 SLM–100 SLM (freely selectable)

2. Sensor: Thermal mass flow sensor

3. Response

• 3760: 2 sec. or less
• 3765 : 3 sec. or less

4. Accuracy

• 3760: ±1.0%F.S. (25?)
• 3765: ±1.5%F.S. (25?)

5. Temperature coefficient

• 3760: ±0.1 F.S./? (15–35?)
• 3765: ±0.2 F.S./? (15–35?)

Repeatability: ±0.5%F.S. (20?), Proof pressure: 980kPa (G), Leak rate: 1 × 10-8 Pa•m3/s or less (excluding permeation of He),  Allowable ambient temperature: 5–45?, Allowable ambient humidity: 10–90% (No condensation allowed),  Materials of parts in contact with gases :  Body: SUS316, Sealing: FKM (option: CR or NBR), Electric connection: Dsub 9-pin connector as per KFC  Standard (Compliant with SEMI Standard), Flow rate output signals : 0–5 VDC (External load resistance: 250 k? or more), Required power supply: +15VDC (±5%) 100mA, ?15VDC (±5%)100mA, 15. Joint (Main unit bore)