Kofloc EX700 Mass Flowmeter was commercialized as “Exact measurement” and “Excellent function as a concept.
Kofloc EX700 Mass Flowmeter was commercialized as “Exact measurement” and “Excellent function as a concept. This is covered from small flow rate (F.S.10sccm) to large flow rate (F.S.200slm) and the 11 flow ranges are ready as standard stock.
Indicator for Air
| Sensor type | Thermal sensor | |
| Flow range (N2) | 10 /50 /100 /500SCCM 1 /5 /10 /20SLM | 50 /100 /200SLM |
| Gas *1 | N2 (Air, H2, He, Ar, O2, CO2/ Change the gas type by conversion factor) | N2 (Air, Ar / Change the gas type by conversion factor) |
| Response | 2 sec. or less | |
| Accuracy *2 | ±1.0%F.S. (25°C) | ±1.5%F.S.(25°C) |
| Temperature characteristics | ±0.2%F.S./°C (15 ～ 35°C) *(±0.4%F.S./°C, 200SLM only) | |
| Repeatability
|
±0.2%F.S.
|
|
| Proof pressure | 980kPa(G) | |
| Working temp. | 5-50°C | |
| Allowable stock temperature | -10-60°C | |
| Allowable operating humidity | 10-90% RH (without dew condensation) | |
| Materials of gas contact part | SUS316, SUS316L, PTFE, FKM (Option NBR, CRP) | |
| Electrical connection | DC power plug and D-sub 9 pin male | |
| Digital communication | RS485 (MODBUS protocol, RTU mode) ID:1-247 | |
| Required power supply (DC) | 24VDC (±10%) less than 100mA | |
| Joint | 1/4SWL type (standard) | 3/8SWL type (standard) |
| Precision needle vale (option) | MODEL2412 (Catalog P116) | MODEL2412D (Catalog P125) |
| Mounting posture | Horizontal installation recommended. | |
| Output method | NPN open collector (max. DC30V, 50mA) | |
| Output number | 2 outputs | |
| Event output | LED (OUT1, OUT2) | |
| Analog output (*4) | ① 4-20mA (less than 500Ω) ② 0-5V (more than 10Ω) ③ 1-5V (more than 10Ω) | |
| Weight | Approx. 600g (without fittings) | Approx. 700g (without fittings) |
