Description
Kofloc Model 3100 Mass Flow Meter
Kofloc Model 3100 Mass Flow Meter is a new, advanced high-precision flowmeter developed based on the Model 3200 Series. The incorporated innovative capillary-type flow sensor reduces pressure loss and ensures high response as well as ensuring stability.
Standard Specifications:
- Flow range (at N2 calibration conditions) : 10SCCM-20SLM
- Response: 1 sec. or less to within ±2% of the full scale of final value typical for 0-100% response
- Accuracy : Within ±1.0% F.S./3100
- Linearity: Within ±0.5% F.S.
- Repeatability: Within ±0.2% F.S.
- Proof pressure: 980kPa
- Leak rate: 1×10-8 Pa•m3/s or less (excluding transmission of He)
- Working temperature range: 0-50? (Accuracy guarantee: 15-35?)
- Materials of parts exposed to gases : Body: SUS 316L, SUS 316, PTFE Seals: Viton® (Optional: Neoprene®)
- Joint : Standard: 1/4SWL® (Optional: 1/8SWL® 1/4VCR® RC1/4®, etc.)
- Electrical connections: Dsub 9-pin male connector per KFC standard (SEMI standard)
- Flow rate output signals: 0-5VDC
- Required power supply* : +15VDC (±5%) 100mA, –15VDC (±5%) 100mA
