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Kofloc EX700 Mass Flowmeter

Kofloc EX700 Mass Flowmeter In comparison with conventional mechanical products, the mass flow measurement/control technology used in a mass flow meter and controller

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Kofloc EX700 Mass Flowmeter
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Description

Kofloc EX700 Mass Flowmeter In comparison with conventional mechanical products, the mass flow measurement/control technology used in a mass flow meter and controller extracts electrical signals from the flow without significantly influencing the temperature or pressure, thus permitting sophisticated flow measurement and control.

Technology of Kofloc EX700 Mass Flowmeter

The technology is widely used for manufacturing semiconductors, liquid crystal, optical fibers and other electronic devices, gas supply for fuel cells, and fuel gas control for burners, foods, and biotechnology, as well as for experimental facilities and production/inspection systems in many other industries.

Features

・Accurate flow measurement and Excellent function
・Full scale 10sccm to 500SLM
・11 Rrange standard stock for fast delivery
・RS-485 communication
・RoHS, CE compliant
・Compact design
・Single power supply connection
・Gas select switch

Applications

  • Air sampling
  • Analyzer component
  • Bioreactor
  • Biotechnological process
  • Burn control
  • CCFL manufacturing
  • Chamber pressure control
  • Chemical process
  • Environment monitoring
  • Electronic device manufacturing
  • Food production
  • Fuel cell testing

Specifications

Sensor type Thermal (EX sensor)
Flow range(N2) 10 /50 /100 /500SCCM　　1 /5 /10 /20SLM 50 /100 /200SLM
Applicable gases（*1） N2(Air, H2, He, Ar, O2, CO2 and C.F.) N2(Air, Ar and C.F.)
Response within 2sec
Accuracy（*2） ± 1.0%F.S. (25℃ ) ± 1.5%F.S.(25℃ )
Temperature coefficient ± 0.2%F.S./℃　(15 ～ 35℃ ) 　※ 200SLM ± 0.4%F.S./℃
Repeatability ± 0.2%F.S.
Proof pressure 980 ｋ Pa(G)
Working Temp. 5 ～ 50℃
Allowable storage temp. -10 ～ 60℃
Materials of gas contact part SUS316, SUS316L, PTFE, FKM (optional NBR,CRP)
Power connection Adaptor or Dsub 9 pin
Digital communication RS485（MODBUS protocol, RTU mode）
Required power supply (DC) 24VDC( ± 10%) 100mA
Joint 1/4F900 (standard) 3/8F900 (standard)
Needle valve (option) MODEL2412 MODEL2412D
Signal Event output 2 x NPN open collector output, integrating pulse output　(Maximum rating DC30V 50mA)
Flow output（*3) ① 4 ～ 20mA   ② 0 ～ 5V   ③ 1 ～ 5V
Weight Approx. 600g (without fittings) Approx. 700g (without fittings)
（*1）　The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
        N2 calibration only.
（*2）　Guarantee only N2 accuracy.
（*3）　Selectable when you order.

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Kofloc EX700 Mass Flowmeter

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